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Preliminary results in investigation of diffractive high-efficiency objectives
V.P. Korolkov1, C. Pruss2, S. Reichelt2, H.J. Tiziani2
1Institute of Automation and Electrometry SB RAS, Novosibirsk, 630090, Russia,
2Institut für Technische Optik, Universität Stuttgart, Germany
Full text of article: Russian language.
It has been shown that high-efficiency diffractive objectives are an alternative to their refractive counterparts for applications requiring high precision transformation of monochromatic light (for example in interferometers). A 80 mm diameter prototype (N.A. - 0.158; design wavelength - 632.8 nm) has been fabricated by direct laser writing on photoresist. It was manufactured on a polar coordinate laser writing system CLWS-300 that is able to write high precision DOEs up to a diameter of 300 mm. The blazed diffractive structures were written directly into a photoresist layer that was spinned on a high-precision substrate. The fabricated objective has arms wavefront error of less than λ / 20 in single pass. The residual errors are predictable using manufacturing data that is recorded during the writing process for each element. This permits to provide each element with calibration data. Measurements of the fabricated DOEs show excellent agreement between the predicted and measured wavefront quality.
diffractive high-efficiency, transformation of monochromatic light, design wavelength, direct laser, photoresist, DOE, high-precision substrate, arms wavefront error.
Korolkov VP, Pruss C, Reichelt S, Tiziani HJ. Preliminary results in investigation of diffractive high-efficiency objectives. Computer Optics 2002; 23: 33-39.
- Buynov N, Larionov NP, Lukin AV, Mustafin KS, Rafikov RA. Holographic interferometric inspection of aspherical surfaces. J Opt Technol 1971; 38: 194-197.
- Tiziani HJ. Prospects of testing aspheric surfaces with computer generated holograms. Proc SPIE 1981; 235: 72-79.
- Dörband B, Tiziani HJ. Testing aspheric surfaces with computergenerated holograms: analysis of adjusment and shape errors. Appl Opt 1985; 24(16): 2604-2611.
- Tiziani HJ, Packroß B, Schmidt G. Testing of aspheric surfaces with computer generated holograms. In Book: Weck M, Hartel R, eds. Proceedings of the International Congress for Ultraprecision Technology. Berlin: Springer-Verlag; 1988: 335-342.
- Korolkov VP, Malyshev AI, Poleshchuk AG, Cherkashin VV, Tiziani HJ, Pruß C, Schoder T, Westhauser J, Wu C. Fabrication of grayscale masks and diffractive optical elements with LDW glass. Proc SPIE 2001; 4440: 73-84.
- Poleshchuk AG, Churin EG, Koronkevich VP, Korolkov VP, Kharissov AA, Cherkashin VV, Kiryanov VP, Kiryanov AV, Kokarev SA, Verhoglyad AG. Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure. Appl Opt 1999; 38(8): 1295-1301.
- Poleshchuk AG, Korolkov VP, Cherkashin VV, Reichelt S, Burge JH. Polar coordinate laser writing systems: error analysis of fabricated DOEs. Proc SPIE 2001; 4440: 161-172.
- Jensen AE. Absolute calibration method for laser twyman-Green wave-front testing interferometers. J Opt Soc Am A 1973; 63(1): 1313.
- Evans CJ, Parks RE, Sullivan PJ, Taylor JS. Visualization of surface figure by the use of Zernike polynomials. Appl Opt 1995; 34: 7815-7819.
- Reichelt S, Daffner M, Tiziani HJ, Freimann R. Wavefront aberrations of rotationally symmetric CGHs fabricated by a polar coordinate laser plotter. Accepted for publication in the Journal of Modern Optics, February, 2002.
- Dörband B. Evaluation of rotational symmetric surface deviations by means of average radial profile. Proc SPIE 1999; 3739: 474-479.
- Hesller T, Rossi M, Kunz RE, Gale MT. Analysis and optimization of fabrication of continuous-relief diffractive optical elements. Appl Opt 1998; 37: 4069-4079.
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