Synthesis of the aperture interference field
B.G. Turukhano, N. Turukhano, E.A. Vilkov

Full text of article: Russian language.

Abstract:
Synthesis of the aperture interference field in the optical range is described, allowing to write down of unlimited length precision linear and radial holographic diffraction gratings. The method of phase modulation developed by authors has allowed increasing accuracy of phase measurements at synthesis diffraction gratings due to what now are created linear and the angular measuring systems possessing nanoresolution.

Key words:
synthesis aperture, interference field, linear and radial holographic diffraction gratings, nanometrology, nanomeasurement systems.

References:

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